Low-loss crystal-ion-sliced single-crystal potassium tantalate films

The dielectric response has been studied in 10-mm-thick, single-crystal potassium tantalate films formed by crystal ion slicing. Scanning microwave microscopy shows that the implanted, pre-etched samples exhibit a bulk-like permittivity and low-loss tangent ~0.0009! at 1.7 GHz. The separated free-standing films have somewhat higher loss tangents due to residual-ion-induced stress. Selective relaxation of this stress by etching or annealing reduces the dielectric loss. © 2002 American Institute of Physics. @DOI: 10.1063/1.1446214#